TMP Package

• replacement of the turbo molecular pump with a revised model
• full cleaning of the instrument
• check of the air system

Vacuum Package

• replacement of the turbo molecular pump with a revised model
• membrane replacement in the primary pump
• check of the complete air system and replacement of tubing material if necessary
• full cleaning of the instrument

Full-service package

• all parts of the vacuum package
• additionally, replacement of all apertures and a complete service of the objective lens and the filament